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Shanghai State-Backed Company Starts Producing Domestic DUV Lithography Tools, Plans to Deliver About 5 Units This Year

2026-07-28 00:55:41

SMIC-2.19%

ASML-4.39%

According to The Information, a Shanghai state-backed company has started manufacturing domestic immersion DUV lithography equipment, with plans to produce about 5 units in 2026 and scale up to approximately 20 units by 2027. The first batch will be delivered to major wafer manufacturers including SMIC, Huahong Semiconductor, and Longsine Technologies, pending validation in precision, stability, and process compatibility. Most components are sourced domestically, though some critical parts still rely on Japanese suppliers. The equipment's performance and manufacturing quality remain behind ASML's offerings; as a comparison, ASML shipped approximately 131 immersion DUV tools in 2025.

Disclaimer: The information on this page may come from third-party sources and is for reference only. It does not represent the views or opinions of Gate and does not constitute any financial, investment, or legal advice. Virtual asset trading involves high risk. Please do not rely solely on the information on this page when making decisions. For details, see the Disclaimer.

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